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April 15, 2024Applied Optics1 citations

Compact auto-aligning interferometers with picometer precision

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XLXiang LinPQPeng QiuYLYurong Liang

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Abstract

This research introduces a compact, auto-aligning interferometer engineered for measuring translations with a wide angular working range and picometer precision above 1Hz. It presents a design ensuring automatic beam alignment during movement through secondary reflection from a corner reflector. The sensor head, a 20×10×10mm 3 all-glass quasi-monolithic structure, exhibits a displacement sensitivity below 1pm/Hz 1/2 above 1Hz and a wide angular working range of ±200mrad. This versatile optical design holds promise to improve the sensitivity in applications such as laser ranging, optical seismometers, precision manufacturing, and metrology.

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Cite This Study

Lin et al. (2024) studied this question.

synapsesocial.com/papers/68e6f15fb6db64358766bceahttps://doi.org/10.1364/ao.522813
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