Wide-Field-of-View, Large-Area Long-Wave Infrared Silicon Metalenses

Long-wave infrared (LWIR, 8–12 μm wavelengths) spectral spectra are of vital importance to thermal imaging. Conventional LWIR optics made from single-crystalline Ge and chalcogenide glasses are bulky and fragile. The challenge is exacerbated for wide-field-of-view (FOV) optics, which traditionally mandates multiple cascaded elements that severely add to complexity and cost. Here, we designed and experimentally realized a LWIR metalens platform based on bulk Si wafers featuring 140° FOV. The metalenses, which have diameters exceeding 4 cm, were fabricated using a scalable wafer-level process involving photolithography and deep reactive ion etching. Using a metalens-integrated focal plane array, we further demonstrated wide-angle thermal imaging.