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February 5, 2026Micromachines1 citationsOpen Access

Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 3rd Edition

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ZDZhi-Xuan DaiTOTakahito OnoCDChing-Liang Dai

Key Points

  • The aim is to highlight the recent developments in MEMS and NEMS technologies and their applications.
  • Review advancements in MEMS and NEMS technologies
  • Discuss applications in intelligent sensing
  • Analyze trends and future directions in the field
  • Identified rapid developments in MEMS and NEMS
  • Highlighted the significance of these devices in sensing applications
  • Outlined potential future advancements and challenges

Abstract

Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) have experienced rapid and sustained development in recent years and have become key enabling technologies for intelligent sensing ...

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Cite This Study

Dai et al. (2026) studied this question.

synapsesocial.com/papers/6984345ff1d9ada3c1fb25c4https://doi.org/10.3390/mi17020205
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Also Consider

Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Advances in MEMS technology: an in-depth analysis of evolution, applications, and future directions2026
  2. 2Advances in Graphene Based MEMS and Nems Devices: Materials, Fabrication, and Applications2022 · 5 citations
  3. 3Journal of Microelectromechanical Systems Publication Information2024
  4. 4Editorial for the Special Issue on Emerging Micro Manufacturing Technologies and Applications, 2nd Edition2025
  5. 5Editorial for the Special Issue on SiC Based Miniaturized Devices, 3rd Edition2026