Fabrication of TiO2 nanopillar arrays and their structural evolution

We report the fabrication and structural study of TiO₂ nanopillar arrays produced by two-step anodization of Al/TiN bilayer (1000 nm/250 nm). The as-prepared nanopillars are amorphous; their structural evolution was investigated upon air annealing in the 300–800°C range. Annealing at 300°C initiates crystallization, at 500°C predominantly nanocrystalline anatase is formed, while at 800°C grain growth and coexistence of anatase and rutile are observed. The array morphology (diameter ~ 20 nm, pitch ~50 nm, height ~150 nm) remains intact even after high-temperature treatment. These results indicate that ~500 °C is an optimal annealing condition to obtain pure anatase while preserving the nanostructured geometry, which is important for photocatalytic applications and for using TiO₂ nanopillar arrays as platforms for hybrid SERS-substrates.