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March 21, 2026Радиотехника и электроника / Journal of Communications Technology and Electronics0 citations

THIN Au+Ge FILM GROWTH ON THE GAAS SURFACE DURING THE PROCESS OF THERMAL EVAPORATION IN VACUUM

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TBT.A. BryantsevaVLV.E. LyubchenkoIMI.A. Markov

Key Points

  • The research aims to investigate the effects of germanium addition on the morphology of thin Au+Ge films during deposition on GaAs.
  • Conducted thermal evaporation in a vacuum environment.
  • Deposited Au+Ge thin films on GaAs surfaces.
  • Analyzed the resulting morphology and structure.
  • Germanium addition led to the creation of donor-doped layers.
  • Prevented the transformation of GaAs into a hexagonal structure.
  • Achieved reduced barrier height for better metal-semiconductor contacts.

Abstract

The morphology and structure of thin films were studied during the deposition of Au+Ge on the GaAs surface by thermal evaporation in a vacuum in order to create metal-semiconductor contacts with a reduced barrier height. It was found that the addition of germanium to the evaporated sample ensures the formation of a layer, doped with donors and prevents the transformation of GaAs into a hexagonal structure.

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Cite This Study

Bryantseva et al. (2025) studied this question.

synapsesocial.com/papers/69be35836e48c4981c673ca5https://doi.org/10.7868/s3034590125090079
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