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April 1, 2026Plasma and Fusion Research0 citationsOpen Access

Atomic Processes in Laser-Produced Tin Plasmas for the Efficient Emission of Extreme-Ultraviolet (EUV) Radiation

ASAkira SASAKIASAtsushi SunaharaKNKatsunobu NISHIHARA

Key Points

  • This research aims to understand the atomic processes involved in laser-produced tin plasmas for EUV radiation emission.
  • Calculated level population of tin ions using a collisional-radiative model.
  • Computed spectral emissivity and opacity considering unresolved transition array effects.
  • Developed a large-scale CR model for emission spectrum simulation.
  • Examined the role of configuration interaction on emission wavelength and peak broadening.
  • Identified key atomic processes affecting EUV emissions from tin plasmas.
  • Revealed relationships between configuration interaction and emission characteristics at λ = 13.5 nm.
  • Demonstrated the efficiency of the CR model in simulating plasma emissions.

Abstract

The atomic processes in laser-produced tin plasmas for the extreme ultraviolet light sources are investigated. The level population of complex tin ions is calculated using the collisional-radiative (CR) model, and then spectral emissivity and opacity are calculated, taking the spectral structure of unresolved transition array into account. A rule-based method for developing a large-scale CR model is discussed, which enables the simulation of the emission spectrum using a relatively compact model. The effect of configuration interaction on the wavelength of the emission and broadening of the main peak at λ = 13.5 nm by the emission from multiply excited states is discussed.

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Cite This Study

SASAKI et al. (2026) studied this question.

synapsesocial.com/papers/69cd79e15652765b073a6ac4https://doi.org/10.1585/pfr.21.2401001
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