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January 27, 2015Journal of Microscopy270 citationsOpen Access

High‐resolution, high‐throughput imaging with a multibeam scanning electron microscope

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AEAnna Lena EberleSMShawn MikulaRSRichard Schalek

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Abstract

Electron-electron interactions and detector bandwidth limit the maximal imaging speed of single-beam scanning electron microscopes. We use multiple electron beams in a single column and detect secondary electrons in parallel to increase the imaging speed by close to two orders of magnitude and demonstrate imaging for a variety of samples ranging from biological brain tissue to semiconductor wafers.

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Cite This Study

Eberle et al. (2015) studied this question.

synapsesocial.com/papers/69df3e0144b0122c4f7a0e28https://doi.org/10.1111/jmi.12224
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