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May 7, 2026Micromachines0 citationsOpen Access

A Double-Layer Parallel MEMS Inductor with Enhanced Current-Carrying Capacity and Thermal Stability

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XPXingyu PiShanghai UniversityJLJiao LiShanghai UniversityHCHongyu ChenShanghai University

Key Points

  • This research aims to develop a double-layer parallel inductor with improved performance characteristics.
  • Designed a double-layer parallel array microcoil structure for an inductor chip
  • Conducted experimental verifications to compare performance with single-layer inductors
  • Measured the DC current capacity and energy storage capability
  • The DLP inductor achieved a maximum DC current capacity of 4.25 A
  • Demonstrated superior energy storage capability per unit area compared to single-layer inductors
  • Showed excellent thermal stability, implying high reliability for integrated circuits

Abstract

As a core component in electronic circuits, the size of inductors is crucial for the thin-film integration and miniaturization of circuits. Although various miniaturized inductors have been fabricated by using integrated circuit technology, their low current-carrying capacity and small inductance values cannot meet current application requirements. Therefore, this paper designs an inductor chip based on a double-layer parallel (DLP) array microcoil structure. Experimental verification demonstrates that the developed DLP inductor exhibits a far superior rated energy storage capability per unit area compared to other single-layer inductors, along with excellent thermal performance. Meanwhile, the 4 × 3 DLP array can withstand a maximum DC current of 4.25 A. This structural innovation provides a meaningful thermal–electromagnetic co-design reference solution for highly reliable integrated power modules.

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Cite This Study

Pi et al. (2026) studied this question.

synapsesocial.com/papers/69fbefa3164b5133a91a3904https://doi.org/10.3390/mi17050571
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