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January 4, 2010Nano Letters1,130 citationsOpen Access

Wafer-Scale Synthesis and Transfer of Graphene Films

YLYoungbin LeeSBSukang BaeHJHouk Jang

Key Points

  • The aim is to synthesize high-quality graphene films at wafer scale and transfer them onto various substrates for electronic applications.
  • Developed a method for synthesizing graphene films on Ni and Cu at ambient pressure.
  • Performed instantaneous etching to transfer graphene onto different substrates.
  • Utilized the large-area graphene for fabricating field-effect transistor arrays and strain gauges.
  • Transistor devices achieved hole mobility of 1100 +/- 70 cm²/(V s) and electron mobility of 550 +/- 50 cm²/(V s) at -0.75 V.
  • Strain sensor exhibited a piezo-resistance gauge factor of approximately 6.1.
  • Methods represent a significant advancement toward large-scale graphene device applications in flexible electronics.

Abstract

We developed means to produce wafer scale, high-quality graphene films as large as 3 in. wafer size on Ni and Cu films under ambient pressure and transfer them onto arbitrary substrates through instantaneous etching of metal layers. We also demonstrated the applications of the large-area graphene films for the batch fabrication of field-effect transistor (FET) arrays and stretchable strain gauges showing extraordinary performances. Transistors showed the hole and electron mobilities of the device of 1100 +/- 70 and 550 +/- 50 cm(2)/(V s) at drain bias of -0.75 V, respectively. The piezo-resistance gauge factor of strain sensor was approximately 6.1. These methods represent a significant step toward the realization of graphene devices in wafer scale as well as application in optoelectronics, flexible and stretchable electronics.

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Cite This Study

Lee et al. (2010) studied this question.

synapsesocial.com/papers/69ff4bbf6018b8d0892d7554https://doi.org/10.1021/nl903272n
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