Key points are not available for this paper at this time.
Preface. 1. The polarization of light waves. 2. Propagation of polarized light through polarizing optical systems. 3. Theory and analysis of measurements in ellipsometer systems. 4. Reflection and transmission of polarized light by stratified planar structures. 5. Instrumentation and techniques of ellipsometry. 6. Applications of ellipsometry. Appendix. Author index. Subject index.
Azzam et al. (1978) studied this question.