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A novel type of spatial three revolute-cylindrical-universal (3-RCU) flexible micro manipulator is designed based on flexible hinges, and analyzed by finite element analysis (FEA). The piezoelectric actuators are adopted as driving devices in this platform, a new lever amplification mechanism is designed as its micro-displacement amplification mechanism, the workspace of the platform is enlarged, and the theoretical and simulation amplification ratios of the amplification mechanism are 3.056 and 2.985, respectively. The margin of error is just 2.3%. In space, the 3-RCU platform can realize the micro movement of three degrees of freedom. Also, the platform has a high carrying capacity, less motion loss, and the transmission efficiency is higher when the platform works. The decoupling performance, stress under extreme conditions and natural frequency of the platform are simulated by ANSYS Workbench software. A series of simulation analyses show the feasibility and security of the platform. The platform has good decoupling and working performance. The simulation results show that the platform has high simulation stiffness and high positioning accuracy.
Qian et al. (2020) studied this question.