Resonant silicon sensors

This paper is a review of the design and fabrication of resonant sensors that are based on resonating silicon structures. Some of the design aspects that control the performance of the resonator sensor are analysed. The most important aspects are: resonator materials, fabrication technology, type of resonator, mode of vibration, quality of vibration and temperature stability. Q-factor-reducing damping factors are discussed and the different techniques that are available for excitation and detection of the vibration of the resonator are described. Descriptions of published resonant silicon sensors are presented.