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November 1, 1981Journal of Vacuum Science and Technology413 citations

Submicroscopic pattern replication with visible light

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UFU. C. FischerHZH. P. Zingsheim

Key Points

  • To demonstrate that visible light can achieve submicroscopic resolution in contact imaging by capturing the optical near field.
  • Illuminated planar submicroscopic metal patterns in direct contact with recording media using 400 nm blue light.
  • Recorded opaque pattern shadows on a negative photoresist and developed the image with permanganate staining.
  • Imprinted transparent metal patterns onto a molecular dye layer via metal-inhibited photochemical bleaching and developed with silver decoration.
  • Achieved a replication resolution of 100 nm using the negative photoresist and permanganate staining method.
  • Achieved a replication resolution of 50 to 70 nm using the molecular dye layer and silver decoration technique.

Abstract

Contact imaging with visible light is possible at submicroscopic resolution because the near field of a radiating object contains information of sufficiently high resolution. In this paper we demonstrate this principle by contact imaging of planar submicroscopic metal patterns with blue light (400 nm). Experimental details are described for two experiments: (1) The shadow of an opaque pattern was recorded on a negative photoresist and developed using permanganate staining. (2) An image of a transparent metal pattern was imprinted onto a molecular dye layer, exploiting the fact that photochemical bleaching of the dye is inhibited by contact with the metal due to energy transfer. Development was by silver decoration. The resolution obtained was 100 nm with the photoresist, and 50 to 70 nm with the dye layer.

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Cite This Study

Fischer et al. (1981) studied this question.

synapsesocial.com/papers/6a0f3b3f04e2b0ba896cb772https://doi.org/10.1116/1.571227
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