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June 3, 2026Applied Physics Letters

Blocking electron current in p-type SnO thin-film transistors to achieve compatibility with 385  ° C back-end-of-line thermal budgets

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Authors

JSJialong SongPDPeng DaiJXJinlong Xiang

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Overview

Randomized trial demonstrates reduced electron current in p-type SnO transistors, suggesting viability for high-temperature integration.

Key Points

  • This study aims to address the challenges faced by p-type SnO thin-film transistors during high-temperature processing for compatibility with back-end-of-line applications.
  • Introduced Pt(O)/Pt electrodes with Al2O3 interlayer for Schottky drain contacts.
  • Designed a submicrometer gate-to-drain gap to enhance electron depletion under negative bias.
  • Simulations were performed to investigate the impact of G-D gap on carrier distribution.
  • Successfully suppressed ambipolar channel conduction after annealing at 385 °C.
  • Reduced electron current by over three orders of magnitude without sacrificing p-type on-current.
  • Confirmed the effectiveness of the G-D gap modulation in electrostatic potential management.

Cite This Study

Song et al. (2026) studied this question.

synapsesocial.com/papers/6a1fc47adee9eb8c0dce5f8dhttps://doi.org/10.1063/5.0307752
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