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April 15, 1975Applied Physics Letters154 citations

Hole mobility and transport in thin SiO2 films

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RHR. C. Hughes

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Abstract

The first measurement of the hole mobility and its temperature dependence in thermally grown SiO2 on Si is reported and found to follow μ≃20 exp(−0.6eV/kT) cm2/V sec. In agreement with previous studies, the energy required to form an electron−hole pair with ionizing radiation is found to be field dependent and at very high fields is in the range of 18 eV/electron−hole pair, and is nearly temperature independent from 77 to 370 °K.

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R. C. Hughes (1975) studied this question.

synapsesocial.com/papers/6a63eb2494d8bae735b37678https://doi.org/10.1063/1.88200
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