Ultrasensitive terahertz metamaterial sensor based on vertical split ring resonators

An ultrasensitive metamaterial sensor based on double-slot vertical split ring resonators (DVSRRs) is designed and numerically calculated in the terahertz frequency. This DVSRR design produces a fundament LC resonance with a quality factor of about 20 when the incidence magnetic field component normal to the DVSRR array. The resonant characteristics and sensing performance of the DVSRR array design are systematically analyzed employing a contrast method among three similar vertical split ring resonator (SRRs) structures. The research results show that the elimination of bianisotropy, induced by the structural symmetry of the DVSRR design, helps to achieve LC resonance of a high quality factor. Lifting the SRRs up from the substrate sharply reduces the dielectric loss introduced by the substrate. All these factors jointly result in superior sensitivity of the DVSRR to the attributes of analytes. The maximum refractive index sensitivity is 788 GHz/RIU or 1.04×105  nm/RIU. Also, the DVSRR sensor maintains its superior sensing performance for fabrication tolerance ranging from −4% to 4% and wide range incidence angles up to 50° under both TE and TM illuminations.