Key points are not available for this paper at this time.
Describes the benefits of using electroadhesion when handling very delicate, polished and/or coated optical and electro‐optical microcomponents. Electroadhesion is a technique already familiar to those working in the semiconductor industry and is eminently suitable for the handling of microcomponents in air, gas or vacuum.
Gareth J. Monkman (2003) studied this question.