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February 27, 2023Applied Physics Letters153 citationsOpen Access

Piezoelectric thin films for MEMS

IKIsaku KannoJOJun OuyangJAJun Akedo

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Kanno et al. (2023) studied this question.

synapsesocial.com/papers/6a7cd2374d80a05d681e6d96https://doi.org/10.1063/5.0146681
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