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Over 0.1 mW ultraviolet output was achieved by an AlGaN-based light-emitting diode. To realize a highly conductive and ultraviolet-transparent layer, a short-period alloy superlattice was introduced. The device was fabricated on SiC substrate. Low electric resistivity due to the short-period alloy superlattice and the high thermal conductivity of the SiC substrate enabled large current injection of up to 1.7 kA/cm2. The emission was monochromatic band-edge emission about 350 nm in wavelength without significant D–A and/or deep emissions.
Nishida et al. (2001) studied this question.