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We report the demonstration of a terahertz quantum-cascade laser that operates up to 164 K in pulsed mode and 117 K in continuous-wave mode at approximately 3.0 THz. The active region was based on a resonant-phonon depopulation scheme and a metal-metal waveguide was used for modal confinement. Copper to copper thermocompression wafer bonding was used to fabricate the waveguide, which displayed improved thermal properties compared to a previous indium-gold bonding method.
Williams et al. (2005) studied this question.