Nanoscale dual-axis accelerometer based on cross-shaped MIM waveguide structure

This paper details the design and simulation of a dual-axis accelerometer based on the cross-shaped MIM waveguide structure, in which mass blocks are set in the middle of metal sheets inside the resonant cavities as acceleration-sensitive elements. To maintain the balance between the sensitivity and accuracy of the accelerometer, the optimal surface plasmon resonances (SPRs) are discussed to determine the relationship between resonance wavelength and acceleration. Firstly, the performances of two single-axis accelerometers are evaluated within the range of -20 g to 20 g, and the fitting results indicate that the wavelengths of specific SPRs are linearly related to the acceleration. The maximum sensitivities of the x-axis and y-axis accelerometers are 0.15 nm/g and 0.31 nm/g, respectively. After that, a dual-axis accelerometer is designed based on the structural features of the two single-axis accelerometers, achieving the maximum acceleration sensitivity S a and FOM of 0.16 nm/g and 0.0015g -1 along the x-axis, and 0.30 nm/g and 0.0077g -1 along the y-axis. As a result, this design implements high-precision independent dual-axis acceleration sensing and presents substantial potential for application in diverse nano-scale acceleration sensing fields.