Abstract We present a 2D hybrid BEM/FEM package that couples an electrostatic simulator with a finite element beam code for the efficient solution of coupled electromechanical problems. The package’s efficiency stems from the use of the same mesh for both the modified BEM and FEM code, the ability to reduce model complexity, and the 2D assumption. This efficiency and speed allows fairly complex static and dynamic analyses to be run on the order of minutes instead of hours. The code for this package was written in Gnu C with Matlab serving as a graphics platform for pre- and post-process analyses. To demonstrate the package’s versatility, we present four groups of examples including electrostatic actuator characterization, coupled solution of elastostatic and electrostatic problems, determination of electric field effects on oscillator natural frequencies, and a stability analysis of a micromechanical structure that employs electrostatic actuators. Results from this simulation package are compared to analytical and experimental results.
Adams et al. (Sun,) studied this question.