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This paper introduces the design of a three-degree-of-freedom parallel piezoelectric micro-platform with simple and compact structure, large stroke and no coupling. Firstly, the driving unit of the micro-moving platform is designed by using the flexible bridge amplifier mechanism of double-layer flexible thin plate, and the platform body of the micro-moving platform is designed based on the double-parallelogram flexible mechanism, and then a new configuration of the x-y-θz parallel piezoelectric micro-moving platform with large displacement stroke is designed. Finally, the static and dynamic performance of the platform is tested by finite element simulation. The results show that the developed platform performs well, and the platform along x, y and θz direction is 308.72μm, 404.72μm and 2.79mrad, and the natural frequencies are 101.76 Hz, 119.71 Hz, and 134.53 Hz, respectively.
Hu et al. (Mon,) studied this question.
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