What question did this study set out to answer?

The aim is to chemically and structurally characterize Mg-doped GaN nanowires using advanced spectroscopy methods.

February 2, 2026Open Access

Nanoscale chemical and structural investigation of Mg-doped GaN nanowires using EDS and WDS on SEM

MAMichael AbratisBruker (Germany)EREric RobinCommissariat à l'Énergie Atomique et aux Énergies Alternatives RTRalf TerborgBruker (Germany)

Key Points

The aim is to chemically and structurally characterize Mg-doped GaN nanowires using advanced spectroscopy methods.
Conducted analyses using EDS and WDS on a FESEM (Field Emission Scanning Electron Microscope).
Maintained low primary energy conditions (4 keV) for high spatial resolution analysis.
Supplemented EDS findings with WDS results to assess structure and trace elements of dopant.
Demonstrated that low energy conditions enhance spatial resolution in nanowire analysis.
Identified magnesium at a concentration of 800 ppm within the nanowires' structure.
Showed the necessity of using both EDS and WDS for comprehensive analysis of semiconductor materials.

Abstract

Semiconductors are the basis of many of today's technical products and therefore an important foundation of our modern economy. One material that is currently the subject of intensive research is doped gallium nitride (GaN), which has outstanding properties, particularly in the form of nanowire structures. For the chemical and structural characterization of such semiconductor nanowires, analyses using EDS and WDS were carried out on a FESEM in this work. The results show that strictly controlled analytical conditions, in particular low primary energy (here 4 keV), are crucial for analysis with high spatial resolution. Only by supplementing the EDS with WDS was it possible to determine both the structure of the nanowires and the trace element content of the dopant Mg (800 ppm). This example proves that advanced analytical questions, in which both high spatial and high spectral resolution are important, can only be solved by using WDS in addition to EDS on SEM.

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