Growth of centimeter-scale multilayer hexagonal boron nitride films by metal-boride-vapor CVD

Key Points

• The aim is to develop a controllable synthesis method for multilayer hexagonal boron nitride films.
• Utilized metal-boride-vapor chemical vapor deposition (CVD) technique
• Focused on achieving atomically smooth surfaces
• Investigated optical properties of spin defects in the films
• Successfully produced multilayer h-BN films
• Films exhibited atomically smooth surfaces
• Demonstrated presence of optically addressable spin defects