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Selection of measurement parameters based on the dynamic characteristics of the scanning probe | Synapse
March 3, 2026
Selection of measurement parameters based on the dynamic characteristics of the scanning probe
XL
Xinfeng Lv
Shanghai University
YS
Yijun Shen
Shanghai Jiao Tong University
XZ
Xu Zhang
Shanghai University
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Key Points
Dynamic characteristics influence the selection of measurement parameters for effective scanning probes.
Optimal measurement parameters can improve the resolution and accuracy in various microfabrication processes.
Assessment of sensor technology reveals critical insights into performance variations across different conditions.
This study supports advancements in science and engineering through optimized scanning probe methodologies.
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Lv et al. (Sat,) studied this question.
synapsesocial.com/papers/69a75a12c6e9836116a1f96b
https://doi.org/https://doi.org/10.1016/j.measurement.2026.120501