A review of recent advancements on materials and methods for microelectromechanical system-based devices

Key Points

• Recent advancements have significantly improved the performance of microelectromechanical systems.
• Key developments include innovative materials, leading to enhanced fabrication techniques and device capabilities.
• Review focuses on microelectromechanical systems, highlighting important new methods and materials for optimal performance.
• This critical analysis points towards the need for further exploration of hybrid materials in future microelectromechanical system designs.