PiezoMEMS Fabrication on Flexible Stainless-Steel Substrates

A bottom-up fabrication approach for flexible piezoelectric micromachined ultrasound transducer (PMUT) arrays on stainless-steel substrates was developed. Devices were fabricated using chemical solution deposition of a 700 nm-thick layer of Pb0.99□0.01(Zr0.52Ti0.48)Nb0.02O3, where □ denotes a vacancy on the Pb site, on 50 μm-thick LaNiO3/HfO2/stainless-steel foils. Lithography for definition of the electrode and piezoelectric layers was completed on the front of the wafer. Ni electroplating on the back side of the foil was used to create locally stiff areas to define the deflection area. PMUT devices were successfully fabricated using this method. The permittivity and loss tangent of the fabricated device at 1 kHz were 283 ± 9 and <1.5%, respectively. The remanent polarization was measured to be 38 ± 0.3 μC/cm2.