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Screen‐printed layers of Al 2 O 3 , BaTiO 3 , 0.90Pb(Mg 1/3 Nb 2/3 )‐0 3 –0.10PbTiO 3 , Pb(Zr,Ti)O 3 , ZnO, and glass alumina pastes have been patterned using photoprinting techniques. Curability of each paste by ultraviolet light and formation of holes with various diameters were studied for application as a production method for very small‐sized vias. The dependence of hole diameters on various experimental parameters is presented and discussed. Wall slopes were found to depend on the transmission of the powders used in the pastes.
Haertling et al. (Thu,) studied this question.
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