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This study investigates the effect of oxygen pressure (P O 2 ) during pulsed laser deposition on the structural, ferroelectric, and piezoelectric properties of thin films. Films were deposited at P O 2 levels of 8.6, 10, 11.5, and 12.7 Pa. The optimal ferroelectric properties were observed at 10 Pa, with a remnant polarization of 2.97 μ C/cm 2 , a coercive field of 33.80 kV/cm, and a saturation polarization of 11.88 μ C/cm 2 , closely matching the target composition. X-ray diffraction and Raman spectroscopy confirmed the presence of a morphotropic phase boundary (MPB) near room temperature. The MPB shifts toward lower temperatures with increasing P O 2 , as characterized by the photoacoustic technique. Frequency measurements based on photoacoustic and piezoelectric effects demonstrated promising performance for piezoelectric micromachined ultrasonic transducers, with resonance frequencies ranging from 9.5 to 13 MHz.
Benítez-Flores et al. (Wed,) studied this question.