The sputtering of metals with noble gas ions; an experiment to determine the fate of the injected gas and its influence on the sputtering process

(1964). The sputtering of metals with noble gas ions; an experiment to determine the fate of the injected gas and its influence on the sputtering process. The Philosophical Magazine: A Journal of Theoretical Experimental and Applied Physics: Vol. 9, No. 98, pp. 343-347.