February 1, 1964

The sputtering of metals with noble gas ions; an experiment to determine the fate of the injected gas and its influence on the sputtering process

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Abstract

(1964). The sputtering of metals with noble gas ions; an experiment to determine the fate of the injected gas and its influence on the sputtering process. The Philosophical Magazine: A Journal of Theoretical Experimental and Applied Physics: Vol. 9, No. 98, pp. 343-347.

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R.S. Nelson (Sat,) studied this question.

synapsesocial.com/papers/6a72025122b3175134db6cbc https://doi.org/https://doi.org/10.1080/14786436408229198

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