The development of B/Cr co-doped DLC coating by FCVA deposition system and its tribological properties at 300 °C

The diamond-like carbon (DLC) coating prepared using filtered cathodic arc deposition (FCVA) lost its promising wear resistance under high temperatures. Element-doped DLC coatings have been investigated to suppress carbon oxidation reaction and subsequently enhance the wear resistance in high-temperature environments. Previous research clarified the excellent tribological properties of boron-doped DLC (B-DLC) but identified challenge such as arc discharge extinguishment and coating declamation (under high-temperature friction test). In this study, the introduction of Argon gas (10 sccm) during the deposition process stabilized stable arc discharge, resulting in high hardness and deposition rate. Moreover, a chromium interlayer and varying concentration of Cr dopant (0.5 %, 1.0 %, 3.0 % at.) were added to B-DLC to develop a stable, co-doped DLC with low friction and high wear resistance. Raman spectroscopy and nano-indentation revealed an increase in the disordered carbon structure and reduction in hardness and Young's Modulus with Cr doping. Macroscopic ball-on-disk friction test, showed 1 % Cr-doped B-DLC (a-C:B:Cr1) coating exhibited super low friction (avg. coefficient 0.02) and a low specific wear rate (<5.0 × 10−6 mm3/Nm). Raman spectroscopy indicated that the transferred graphite-like tribo-film onto the surface of Si3N4 counterparts contributed to stable low friction. Additionally, XPS analysis on the DLC coatings' wear track suggested the rich BB bond might contribute to its high wear resistance. This successful improvement on element-doped DLC prepared by FCVA provided valuable insights for further exploration of DLC coating applied to various working situations.