Large deflection of electrostatically actuated microbeams – How do the bending modes contribute beyond pull-in?

Key Points

• The bending modes significantly influence the deflection of electrostatically actuated microbeams, enhancing performance beyond initial expectations.
• Deflection results demonstrate that varying bending modes lead to notable changes, with a maximum observed deflection of 407 micrometers.
• Analysis of electrostatic actuation mechanisms was carried out, exploring interactions among multiple bending modes that challenge conventional wisdom.
• Findings highlight the necessity for considering bending modes in the design of microbeams, calling for deeper exploration into multi-mode dynamics.