Reliability Aspects of in-plane NED Bending Actuators in Silicon-based MEMS

Key Points

• The reliability of in-plane bending actuators is crucial for MEMS performance, impacting their longevity and functionality.
• Specific mechanical properties, such as fatigue resistance, were evaluated to determine performance consistency over multiple cycles.
• Assessment using fabricated silicon-based MEMS devices provides insights into the structural integrity and operational limits under stress.
• Findings highlight the importance of reliability in actuator design, suggesting that enhancements could significantly improve MEMS applications.