Influence of a Novel Solid Thermal Isolation Material for Mems on Thermopile Sensitivity and Dynamic Response of a Mems Flow Sensor

Key Points

• Enhanced thermopile sensitivity improves flow measurements, indicating a better performance of MEMS devices.
• A significant increase of 25% in sensitivity was observed with the new thermal isolation material.
• Observational analysis of various flow sensors showed how thermal isolation impacts dynamic response.
• Results suggest potential for improved applications in various MEMS technologies.