Investigating the impact of rapid thermal annealing atmosphere on the properties of sputtered SnO thin films with a tellurium capping layer

Key Points

• Sputtered tin oxide films showed significant property changes based on the thermal annealing atmosphere used.
• The study observed varying conductivity and optical properties in films annealed in different atmospheres.
• Analysis involves investigation of sputtered films with a tellurium capping layer to enhance performance features.
• Findings highlight potential applications in electronic devices, indicating a need for further material optimization.