Design, fabrication and testing of MEMS based piezoresistive force sensor for human-machine interaction system in biomedical applications

Key Points

• The sensor demonstrates enhanced sensitivity and accuracy, making it suitable for various biomedical applications.
• Peak performance metrics indicate improved response time and reliability over traditional sensors in similar setups.
• Assessment using mechanical testing protocols confirms the sensor's robustness and accuracy in force measurement.
• The findings suggest promising applications in biomedical fields, supporting further integration into human-machine systems.