Micro-electro-mechanical systems (MEMS) have revolutionised technology by integrating microelectronics with mechanical systems to create versatile miniature devices. This review explores MEMS evolution, from early developments to recent advancements. It outlines core principles of MEMS design and fabrication, including lithography, deposition, and etching. The paper examines various MEMS devices - sensors, actuators, resonators, and microfluidic systems - emphasising design considerations, fabrication techniques, and performance metrics. It highlights MEMS applications in healthcare, automotive, aerospace, consumer electronics, and telecommunications, driving innovations in medical diagnostics, environmental sensing, and autonomous technologies. Emerging research on new materials, advanced fabrication methods, and integration with nanotechnology and biotechnology is discussed. Key challenges, such as scalability, reliability, and energy efficiency, are addressed, providing insights into future directions. This article serves as a valuable resource for understanding MEMS history, current state, and future opportunities for researchers and industry professionals.
Tran et al. (Thu,) studied this question.