ПОЛУЧЕНИЕ ВЫСОКОКАЧЕСТВЕННЫХ ПОВЕРХНОСТЕЙ ОПТИЧЕСКИХ ЭЛЕМЕНТОВ ИЗ КОМПОЗИЦИОННОЙ КЕРАМИКИ YO–MgO

The paper investigates the polishing processes of two-phase YO–MgO ceramics in order to improve the surface quality for optical applications. A comparative analysis of three processing methods is carried out: mechanical, chemical-mechanical and magnetorheological polishing. Consistent application of these approaches, including preliminary deep grinding and polishing to eliminate the disturbed layer, can significantly improve the cleanliness and accuracy of the treated surface. The final magnetorheological polishing ensures the achievement of an average roughness () of 0.6 nm, a standard deviation (RMS) of 0.8 nm, surface purity of the 2nd class according to GOST 11141-84 and shape accuracy of optical elements up to λ/4. Based on the results obtained, experimental optical elements were manufactured that meet modern requirements for a wide range of optical applications.