The present minireview considers fundamental electrochemistry and its relation to microelectronics. Various solid electrolytes, principally inorganic ones are described, including LiPON, and diverse sulfide and oxide electrolytes. Examples of all-solid-state electrochemical devices important for microelectronics are described and discussed, such as electrochemical gas compressors and gas purification systems, electrochemical gas sensors, including high-temperature ones, as well microbatteries and thin-film batteries.
Skundin et al. (Mon,) studied this question.