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A miniature differential microphone is described having a low-noise floor. The sensitivity of a differential microphone suffers as the distance between the two pressure sensing locations decreases, resulting in an increase in the input sound pressure-referred noise floor. In the microphone described here, both the diaphragm thermal noise and the electronic noise are minimized by a combination of novel diaphragm design and the use of low-noise optical sensing that has been integrated into the microphone package. The differential microphone diaphragm measures 1 x 2 mm(2) and is fabricated out of polycrystalline silicon. The diaphragm design is based on the coupled directionally sensitive ears of the fly Ormia ochracea. The sound pressure input-referred noise floor of this miniature differential microphone has been measured to be less than 36 dBA.
Miles et al. (Wed,) studied this question.