ASML (Netherlands)

Recent papers from ASML (Netherlands)

1. Wavefront Shaping for Optimal Extinction of Focused Light by Individual NanoscatterersLaser & Photonics Review · 2026
2. Particle charging and lofting from a surface under plasma conditions relevant for space and EUV applicationsPhysics of Plasmas · 2026
3. Rapidly resolving bilayer stacking orientation in industrially compatible MOCVD-grown MoS2 films through second harmonic generation imagingApplied Physics Letters · 2026
4. Microporous diffractive filter for infrared rejection in high-harmonic generation setupsOptics Express · 2026
5. Film Thickness Nonuniformity and the Crucial Role of Water Dosage for Atomic Layer Deposition of Yttrium Oxidephysica status solidi (a) · 2026
6. Reconfigurable interferometric form and mid-spatial frequency metrology for extended reality freeform opticsOptics Express · 2026
7. Nullspace-based fault diagnosis for closed-loop mechatronic systems with application to semiconductor equipmentControl Engineering Practice · 2026
8. Electric forces on conducting spheres in millimeter sized high-voltage gapsJournal of Electrostatics · 2026
9. Optical constants of Sc, V, Cr, Co, Ni, Nb, Mo, Rh, Pd, Hf, W, Re, Os, Ir, Pt, Au, and ZrO ₂ in the extreme ultraviolet rangeOptics Express · 2026
10. Hydrogen Radical Permeation Dynamics through Ultrathin ALD Al ₂ O ₃ Layers Revealed by In Situ EllipsometryThe Journal of Physical Chemistry C · 2026
11. Impact of NH Emission on Determining the Rotational Temperature From the Second Positive System of N2Plasma Processes and Polymers · 2026
12. Emissivity of Mo₅Si₃C thin films for radiative cooling in EUV pelliclesSurfaces and Interfaces · 2026
13. Wavefront Selective Modal Excitations for Optimally Informative Sensing in Fano‐Resonant MetasurfacesNanophotonics · 2026
14. Particle charging in afterglow of EUV-induced plasmaPhysics of Plasmas · 2026
15. Numerical describing function analysis of closed-loop discrete-time reset control systemsMechatronics · 2026
16. Low-temperature aluminum-induced layer exchange of Ge on Si for CMOS-compatible SiGe integrationMaterials Science in Semiconductor Processing · 2026
17. Simulating the influence of stoichiometry on the spectral emissivity of Mo x Si y thin filmsPhysical Review Materials · 2026
18. Multi-Trigger Resists: Modeling and Simulation ResultsJournal of Photopolymer Science and Technology · 2025
19. Light-induced damage in semiconductor device manufacturing: Present and future challengesJournal of Applied Physics · 2026
20. Controlled dust mobilization on a solid surface with grazing electron beam incidencePhysical review. E · 2026