ASM International (Belgium)

Recent papers from ASM International (Belgium)

1. A Novel RMG pWFM Molybdenum Patterning for sub-10nm DRAM Periphery FinFET Platform2026
2. Dissecting the transition metal dichalcogenides-based metal-oxide-semiconductor structures charge componentsnpj 2D Materials and Applications · 2026
3. Detection Techniques for Polycyclic Aromatic Hydrocarbons and Their Metabolites: A Reviewphysica status solidi (a) · 2026
4. Oxygen-Activated Surface Chemistry Enabling Low-Temperature CVD of RuS ₂ for Broadband PhotodetectorsChemistry of Materials · 2026
5. Optical Access to the Electronic Nature of Device-Relevant Dislocations in High-Purity Semi-Insulating SiCACS Omega · 2026
6. Bioresorbable Mo–W Electrodes: Toward an Extended Operational Lifetime Through Controlled Alloying and Oxide Coating EngineeringAdvanced Materials Interfaces · 2026
7. Elucidation of Enhanced Lysine Sensing via Pt-Functionalized 2D WS ₂ for Biosensing ApplicationsACS Applied Materials & Interfaces · 2026
8. Resolving the On–Off Ratio Discrepancy in Bilayer 3R-MoS ₂ FeSFETs: Dual Mechanisms of Domain Wall EngineeringNano Letters · 2026
9. Poole–Frenkel emission and bulk charge trapping in AlON deposited on GaN and comparison to Al2O3Journal of Applied Physics · 2026
10. Density Functional Theory Study of Engineering TiS2 Work Function through Intrinsic Defects and Surface Oxidation for Field-Effect TransistorsACS Applied Nano Materials · 2025
11. Multi-project wafer runs for electronic graphene devices in the European 2D-Experimental Pilot Line projectNature Communications · 2025
12. Nanostructuring copper thin film electrodes for CO ₂ electroreduction to C ₂₊ productsNanoscale · 2025
13. Line wiggling due to plasma-induced film stress and prevention by surface roughness modificationJournal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2025
14. Atomic layer deposition of transition metal chalcogenide TaSx using Ta[N(CH3)2]3[NC(CH3)3] precursor and H2S plasmaJournal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2024
15. Electrical Stability of MOS Structures With AlON and Al₂O₃ Dielectrics Deposited on n- and p-Type GaNIEEE Transactions on Electron Devices · 2024
16. Low-Temperature Dechlorosilylation Chemistry for Area-Selective Deposition of Ge₂Sb₂Te₅ and Its Mechanism in NanopatternsChemistry of Materials · 2024
17. Pure-Metal Replacement Gate for Reliable 30 nm Pitch Scaled 3D NAND Flash2024
18. Enhancing dielectric passivation on monolayer WS2 via a sacrificial graphene oxide seeding layernpj 2D Materials and Applications · 2024
19. Voltage contrast determination of design rules at the limits of EUV single patterningJournal of Micro/Nanopatterning Materials and Metrology · 2023
20. MoS₂ Synthesized by Atomic Layer Deposition as Cu Diffusion BarrierAdvanced Materials Interfaces · 2023