Micro Resist Technology (Germany)

Recent papers from Micro Resist Technology (Germany)

1. Multiscale hierarchical microstructures fabricated by combining direct laser writing and laser interference lithography for direction-dependent patterningOptics & Laser Technology · 2026
2. Stigma Power and the Specificity of Sex Work: An Intersectional AnalysisSocieties · 2026
3. Towards greener-by-design fine chemicals. Part 1: synthetic frontiersChemical Society Reviews · 2025
4. Translation of COVID-19 Serology Test on Foil-Based Lateral Flow Chips: A Journey from Injection Molding to Scalable Roll-to-Roll Nanoimprint LithographySHILAP Revista de lepidopterología · 2025
5. Learning Decision Criteria from PlayDynamic Games and Applications · 2024
6. Comprehensive evaluation of grayscale laser lithography build accuracy via benchmark artefacts2024
7. Characterization of negative tone photoresist mr-EBL 6000.5 for i-line stepper and electron beam lithography for the Intra-Level Mix & Match ApproachMicro and Nano Engineering · 2024
8. Challenges of photomask-based greyscale lithography with a highly-sensitive positive photoresist designed for>100µm deep greyscale patterns2024
9. Novel multi-layer nanoimprint lithography material system enabling nano-patterning of functional optical layers2024
10. Assessing hybrid polymers as innovative photolithography material allowing advanced high aspect ratio/high resolution patterns for micro-optics and patterned passivation layers2024
11. Intra-level mix and match lithography with electron beam lithography and i-line stepper combined with resolution enhancement for structures below the CD-limitMicro and Nano Engineering · 2023
12. Manufacturing of nanostructures with high aspect ratios using soft UV-nanoimprint lithography with bi- and trilayer resist systemsMicro and Nano Engineering · 2022
13. Hybrid structures by direct write lithography—Tuning the contrast and surface topography of grayscale photoresist with nanoimprintJournal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2021
14. Novel Concept of Micro Patterned Micro Titer Plates Fabricated via UV-NIL for Automated Neuronal Cell Assay Read-OutNanomaterials · 2021
15. Versatile fabrication method for multiscale hierarchical structured polymer masters using a combination of photo- and nanoimprint lithographyMicro and Nano Engineering · 2021
16. High quality diffractive optical elements (DOEs) using SMILE imprint techniqueAdvanced Optical Technologies · 2021
17. Study of EB Resist Simulation for EUV Resist EvaluationJournal of Photopolymer Science and Technology · 2020
18. Development of a soft UV-NIL step&repeat and lift-off process chain for high speed metal nanomesh fabricationNanotechnology · 2020
19. A study of imprint and etching behavior on fused silica of a new tailored resist mr-NIL213FC for soft UV-NILMicro and Nano Engineering · 2020
20. Smart Origination and Functional Replication: Thermal Reflow and Innovative 3D StructuresJournal of Photopolymer Science and Technology · 2020