Effect of laser cutting speed on structure of cut surface of silicon nitride ceramics

The processes occurring with silicon nitride-based ceramic materials in the area of ytterbium laser radiation exposure have been investigated. The effect of laser processing speed in a range of 5-15 mm / s on the microstructure and phase composition of the cut surface was studied. It is shown that the formation of the defective layer is affected by thermal decomposition of the ceramics, as well as melting and oxidation of the resulting reaction products. The best condition of the cut surface was achieved at a laser processing speed of 5 mm / s.