Chemical–Mechanical Super-Polishing of Al2O3 (0001) Wafer for Epitaxial Purposes

A super-polishing procedure was performed on the Al2O3 (0001) surface for epitaxial purposes. The roughness of the final polished surface was measured to be 0.16 nm using atomic force microscopy and X-ray reflectivity techniques. After heat treatment at 130 °C, results from low-energy electron diffraction and Auger energy spectroscopy indicated that the top surface was well ordered and clean, rendering it suitable for epitaxial growth. The successful growth of a GaN thin film on an Al2O3 (0001) substrate was confirmed by the hk-circle scan in XRD and the presence of a sharp peak in the rocking curve of the GaN (0002) Bragg peak. These findings indicate that the top surface of the substrate is conducive to epitaxial growth.