Conformal ALD of tin-doped indium oxide transparent p-ohmic contacts for micro- and nano-LEDs

Sohyeon Park; Taeseok Kim; Sung Hyuk Park; Hee Ryeong Kwon; Sung Jin Seo; Mandar A. Kulkarni; Jung‐El Ryu; Yongjo Park; Sang‐Wan Ryu; Seong Keun Kim; Ho Won Jang

doi:10.1039/d5tc01462j

January 1, 2025Journal of Materials Chemistry C

Conformal ALD of tin-doped indium oxide transparent p-ohmic contacts for micro- and nano-LEDs

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Key Points

This approach achieves high-efficiency p-ohmic contacts for GaN-based micro-LEDs and nano-LEDs.
The bilayer configuration enables conformal, smooth, and transparent finishes, enhancing device performance.
Utilizing PEALD, this method minimizes damage while optimizing contact properties across micro-LED dimensions.
These advancements may significantly improve the longevity and efficiency of LED technologies.

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Implication

Bilayer PEALD ITO/ALD In2O3 creates durable p-ohmic contacts for high-efficiency micro-LEDs and nano-LEDs.

Abstract

A bilayer PEALD ITO/ALD In 2 O 3 enables conformal, smooth, transparent, and damage-free p-ohmic contacts for high-efficiency GaN-based micro- and nano-LEDs.

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Park et al. (2025) studied this question.

synapsesocial.com/papers/68c1a78154b1d3bfb60e1005 https://doi.org/10.1039/d5tc01462j

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Conformal ALD of tin-doped indium oxide transparent p-ohmic contacts for micro- and nano-LEDs

Key Points

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Implication

Abstract

Discussion

Cite This Study

Conformal ALD of tin-doped indium oxide transparent p-ohmic contacts for micro- and nano-LEDs

Key Points

Ask about this paper

Implication

Abstract

Discussion

Cite This Study

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