System-Level Mathematical Macro-Models of Logic MEMS Gates

The relevance of the study is due to the rapid development of microelectromechanical systems (MEMS), which are used as logic elements due to low power consumption, high reliability and the ability to reprogram during operation. However, existing approaches to the design of MEMS logic gates require the development of compact and accurate mathematical models to analyze their dynamic characteristics and logical operations at the system level. The article presents a method for synthesizing parametric mathematical models of MEMS logic gates based on silicon resonators with electrostatic excitation. A library of design macromodels has been developed, including three-, fiveand nine-pin MEMS resonators, which allow analyzing static, frequency and dynamic characteristics. The analysis of the electrode collapse effect, harmonic analysis and simulation of logical operations such as NOT, AND, OR-NOT and exclusive OR are carried out. The developed models can be used for designing analog-todigital and digital-to-analog converters, triggers and arithmetic logic devices based on MEMS technologies.