Update Disturbance‐Resilient Analog ReRAM Crossbar Arrays for In‐Memory Deep Learning Accelerators

Resistive memory (ReRAM) technologies with crossbar array architectures hold significant potential for analog AI accelerator hardware, enabling both in-memory inference and training. Recent developments have successfully demonstrated inference acceleration by offloading compute-heavy training workloads to off-chip digital processors. However, in-memory acceleration of training algorithms is crucial for more sustainable and power-efficient AI, but still in an early stage of research. This study addresses in-memory training acceleration using analog ReRAM arrays, focusing on a key challenge during fully parallel weight updates: disturbances of the weight values in cross-point devices. A ReRAM device solution is presented on 350 nm silicon technology, utilizing a resistive switching conductive metal oxide (CMO) formed on a nanoscale conductive filament within a HfOx layer. The devices not only exhibit 60 ns fast, non-volatile analog switching, but also demonstrates outstanding resilience to update disturbances, enduring over 100k pulses. The disturbance tolerance of the ReRAM is analyzed using COMSOL Multiphysics simulations, modeling the filament-induced thermoelectric energy concentration that results in highly nonlinear device responses to input voltage amplitudes. Disturbance-free parallel weight mapping is also demonstrated on the back-end-of-line integrated ReRAM array chip. Finally, comprehensive hardware-aware neural network simulations validate the potential of the ReRAM for in-memory deep learning accelerators capable of fully parallel weight updates.